L4M-II
FP7-JTI LAB4MEMS II
Funding agency: EC (European Commission) Under the JTI-CP-ENIAC 2013 Project Id: 621176
Project members/Partners STMICROELECTRONICS SRL Italy (Coordinator), POLITECNICO DI TORINO Italy, POLITECNICO DI MILANO Italy, CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA IU.NET Italy, CONSIGLIO NAZIONALE DELLE RICERCHE Italy, COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES France, ARKEMA FRANCE SA France, UNIVERSITA TA MALTA Malta, OKMETIC OY Finland, Murata Electronics Oy Finland, VTT MEMSFAB OY Finland, TEKNOLOGIAN TUTKIMUSKESKUS VTT Finland, AALTO KORKEAKOULUSAATIO SR Finland, ICOS VISION SYSTEMS NV Belgium, UNIVERSITATEA POLITEHNICA DIN BUCURESTI Romania, INSTYTUT TECHNOLOGII ELEKTRONOWEJ Poland, STIFTELSEN SINTEF Norway, POLEWALL AS Norway, BESI AUSTRIA GMBH Austria.
Researchers @ UniMORE: Luca Larcher
Start date: 01/06/2014
End date: 01/06/2017
Micro-Optical MEMS, micro-mirrors and pico-projectors.
Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc.
The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of MOEMS technology in commercialization of many industrial components which are today’s most desirable elements of optical communication, i.e. MEMS-actuated micro optical mirrors, autofocus lens or 3D laser micro-scanners.
Project web site: http://www.lab4mems2.ite.waw.pl/